Computational Lithography
Book Description:
A Unified Summary of the Models and Optimization Methods Used in Computational LithographyOptical lithography is one of the most challenging areas of current integrated circuit manufacturing technology. The semiconductor industry is relying more on resolution enhancement techniques (RETs), since their implementation does not require significant changes in fabrication infrastructure. Computational Lithography is the first book to address the computational optimization of RETs in optical lithography, providing an in-depth discussion of optimal optical proximity correction (OPC), phase shifting mask (PSM), and off-axis illumination (OAI) RET tools that use model-based mathematical optimization approaches.The book starts with an introduction to optical lithography systems, electric magnetic field principles, and the fundamentals of optimization from a mathematical point of view. It goes on to describe in detail different types of optimization algorithms to implement RETs. Most of the algorithms developed are based on the application of the OPC, PSM, and OAI approaches and their combinations. Algorithms for coherent illumination as well as partially coherent illumination systems are described, and numerous simulations are offered to illustrate the effectiveness of the algorithms. In addition, mathematical derivations of all optimization frameworks are presented.The accompanying MATLAB software files for all the RET methods described in the book make it easy for readers to run and investigate the codes in order to understand and apply the optimization algorithms, as well as to design a set of optimal lithography masks. The codes may also be used by readers for their research and development activities in their academic or industrial organizations. An accompanying MATLAB software guide is also included. An accompanying MATLAB software guide is included, and readers can download the software to use with the guide at ftp://ftp.wiley.com/public/sci_tech_med/computational_lithography.Tailored for both entry-level and experienced readers, Computational Lithography is meant for faculty, graduate students, and researchers, as well as scientists and engineers in industrial organizations whose research or career field is semiconductor IC fabrication, optical lithography, and RETs. Computational lithography draws from the rich theory of inverse problems, optics, optimization, and computational imaging; as such, the book is also directed to researchers and practitioners in these fields.
Download Link:
Related Books:
Adaptive Image Processing
A Computational Intelligence Perspective
Adaptive image processing is one of the most important techniques in visual information processing, especially in early vision such as image restoration, filtering, enhancement, and segmentation. While existing books present some important aspects of the issue, there is not a single book that treats this problem from a viewpoint that is directly linked to human perception - until now. This reference treats adaptive image processing from a computational intelligence viewpoint, systematically and successfully, from theory to applications, using the synergies of neural networks, fuzzy logic, and evolutionary computation. Based on the fundamentals of human perception, this book gives a detailed account of computational intelligence methods and algorithms...
Computational Finance
Using C and C#
In Computational Finance Using C and C# George Levy raises computational finance to the next level using the languages of both standard C and C#. The inclusion of both these languages enables readers to match their use of the book to their firm's internal software and code requirements. Levy also provides derivatives pricing information for: - equity derivates: vanilla options, quantos, generic equity basket options- interest rate derivatives: FRAs, swaps, quantos - foreign exchange derivatives: FX forwards, FX options- credit derivatives: credit default swaps, defaultable bonds, total return swaps. Computational Finance Using C and C# by George Levy is supported by extensive web resources. Available for purchase on the multi-tier website are e versi...
Computational Intelligence for Remote Sensing
This book is a composition of different points of view regarding the application of Computational Intelligence techniques and methods to Remote Sensing data and applications. It is the general consensus that classification, its related data processing, and global optimization methods are core topics of Computational Intelligence. Much of the content of the book is devoted to image segmentation and recognition, using diverse tools from different areas of the Computational Intelligence field, ranging from Artificial Neural Networks to Markov Random Field modeling. The book covers a broad range of topics, starting from the hardware design of hyperspectral sensors, and data handling problems, namely data compression and watermarking issues, as well as au...
2007 - 2021 © eBooks-IT.org